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Pump

Diffusion pump
2023.04.05 15:17

HS-16

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The Agilent HS-16 oil diffusion pump is a pump with high throughput and high pumping speed of 6000 L/s.

With its fully optimized vapor jet, the robust boiler design and the thermal protection switches the pump will run without any maintenance for many years.

It is available with 16 in. ASA or ISO 500K inlet flange.

This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

 

 

 

 

Features


 

  • -Fill and drain assembly allows for easy maintenance of pump fluid
  • -Five-stage fractionating jet purifies pumping fluid for cleaner operation
  • -Stable and reliable performance under widely varying operation conditions
  • -Foreline baffle prevents loss of fluid into backing pump system
  • -Fluid-level sight glass provides quick indication of pump fluid status at all times
  • -High forepressure tolerance
  • -Low ultimate pressure
  • -Robust boiler design
  • -High throughput with high pumping speed

 

 

 

Information


 

 

 
Backstreaming Rate
  • 1.5 x 10-3 mg/cm²/min
Cooldown Time
  • 30 min
Electrical Requirements
  • 3 ph
  • 50/60 Hz
  • 240/415/480 V
Fluid Charge
  • 2839 CC
Fluid Type
  • Oil
Input Voltage
  • 208, 240, 380, 400, 415, 460, 480, 575 V
Maximum Forepressure - Full Load
  • 0.55 Torr
  • 0.72 mbar
Maximum Forepressure - No Load
  • 0.65 Torr
  • 0.85 mbar
Maximum Throughput
  • 9.5 T-L/s (11.7 mbar-L/s) at 8100 W
Operating Range
  • 2 x 10-3 to <5 x 10-8 Torr
  • 1.3 x 10-3 to <6.5 x 10-8 mbar
Pump Weight
  • 500 lbs
  • 227 kg
Pumping Speed - Air
  • 6000 L/s
Pumping Speed - Air, via AVS 4.1 (1963)
  • 10000 L/s
Pumping Speed - He/H2
  • 7500 L/s
Recommended Backing Pump
  • ≥ 80 cfm (136 m3/hr)
Warmup Time
  • 30 min
Water Connections
  • 1/4 inch FPT
Water Cooling - Temperature Requirement
  • 60-80 °F
  • 15-26 °C
Water Cooling Flow Requirement
  • 1.5 gpm
  • 300 L/hr

 

 

 


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