-

The Agilent HS-20 oil diffusion pump is a pump with a high throughput and high pumping speed of 10,000 L/s.

With its fully optimized vapor jet, robust boiler design and thermal protection switches, the pump will run without any maintenance for many years.

It is available with 20 in. ASA or ISO 630K inlet flange.

This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics, and protective film layers.

 

 

 

 

Features

---

 

• -Five-stage fractionating jet purifies pumping fluid and assures low base pressure
• -High tolerable forepressure
• -Full thermal protection
• -Fluid-level sight glass provides quick indication of pump fluid status at all times
• -Fill and drain assembly for pump fluid
• -Standard gauge port (NW-25) below inlet flange included
• -Foreline baffle prevents loss of fluid into backing pump system
• -Optional halo baffle reduces backstreaming without adding height

 

 

 

Information

---

 

 

 

Backstreaming Rate	1.5 x 10-3 mg/cm²/min
Cooldown Time	45 min
Electrical Requirements	3 ph 50/60 Hz 240/415/480 V
Fluid Charge	4731 CC
Fluid Type	Oil
Input Voltage	208, 240, 380, 400, 415, 440, 460, 480, 575 V
Maximum Forepressure - Full Load	0.55 Torr 0.72 mbar
Maximum Forepressure - No Load	0.65 Torr 0.85 mbar
Maximum Throughput	12.5 T-L/s (16.7 mbar-L/s)
Operating Range	1.3 x 10-3 to 5 x 10-8 Torr 1.7 x 10-3 to 6.5 x 10-8 mbar
Pump Power	12000 W
Pump Weight	600 lbs 272.2 kg
Pumping Speed - Air	10000 L/s
Pumping Speed - Air, via AVS 4.1 (1963)	17500 L/s
Pumping Speed - He/H2	12500 L/s
Recommended Backing Pump	≥ 100 cfm (170 m3/hr)
Warmup Time	45 min
Water Connections	1/4 inch FPT
Water Cooling - Temperature Requirement	60-80 °F 15-26 °C
Water Cooling Flow Requirement	1.5 gpm 300 L/hr